Corrugated silicon nanocone (SiNC) arrays have been fabricated on a silicon wafer by two polystyrene-sphere-monolayer-masked etching steps in order to create high-performance antireflective coatings. The reflectance was reduced from above 35 % to less than 0.7 % in the range 400 - 1050 nm, and it remained below 0. 5% at incidence angles up to 70° at 632.8 nm for both s- and p-polarised light. The fluorinated corrugated SiNC array surface exhibits superhydrophobic properties with a water contact angle of 164°.
Read the complete paper in "Nano Research", Vol. 3, No.7, July, 2010. You may also find it in the 'start-up' on-line version at http://www.thenanoresearch.com/